3D Integration: Why, What, Who, When?

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3D Integration: Why, What, Who, When?
(7/9/2007) Future Fab Intl. Issue 23
By James Jian-Qiang Lu, Rensselaer Polytechnic Institute
Ken Rose, Rensselaer Polytechnic Institute
Susan Vitkavage, SEMATECH

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The potential benefits of 3D integration can vary depending on approach; they include multifunctionality, increased performance, reduced power, small form factor, reduced packaging, increased yield and reliability, flexible heterogeneous integration and reduced overall costs. For example, a small form factor is achieved by stacking active component layers on top of one another in any 3D approach.

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