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Impact of Wafer-Level 3D Stacking on the Yield of ICs
(7/9/2007) Future Fab Intl. Issue 23
By Robert Patti, Tezzaron Semiconductor
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To take advantage of process separation, a 3D DRAM chip would be designed with all its bit cells on separate layers from its support circuitry. The processing of the two types of layers, on their separate wafers, would be very different – each process highly optimized for its contents.

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