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Environment, safety, and health (ESH) is considered a crosscut technology within the ITRS. The ITRS is primarily focused on the technology required for advanced semiconductors, which involves creative, innovative solutions. ESH issues associated with these innovative solutions must be evaluated, as they are being developed and considered for full-scale manufacturing. Early identification of ESH issues enables technology solutions to be introduced in a timely manner and ensures that necessary, appropriate ESH safeguards are implemented. It also prevents ESH show stoppers and reduces ESH risk and cost.
For each technology area, the requirements and potential solutions for these five ESH challenges are described. Solutions to these challenges must be identified and developed along with technology development. In addition to the specific technology tables, the ESH section of the ITRS also contains ESH intrinsic requirements. In making ESH-related technology decisions, there is a need for ESH analysis methodologies, data sets, and interpretation methods. An example of this is the measurement and evaluation method for determining ESH risk. The ESH intrinsic requirements define the goals for establishing these ESH tools.
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