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FTIR and Raman spectroscopy are
complementary vibrational spectroscopy
techniques that help elucidate the molecular
bonding and molecular structure in low-k
materials. Raman spectra arise from inelastic
scattering of the incident energy from a laser
source, as a function of molecular vibrational
energy. FTIR spectra arise from absorption of
polychromatic radiation at specific energies of
molecular group vibrations. Due to different
selection rules, the two techniques are
sensitive to different types of bonding and
molecular geometries. Determination of the film chemistry is usually accomplished from a complementary analytical approach employing techniques such as RBS (Rutherford backscattering) and HFS (hydrogen forward scattering) for atomic composition, Auger or ToFSIMS (time of flight secondary ion mass spectrometry) depth profiling for elemental composition uniformity from top to bottom of the film, and FTIR (Fourier transform infrared) and Raman spectroscopy for determination of the molecular bonding chemistry within the film. The latter two techniques are complementary vibrational spectroscopy techniques.
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